принципы и методы"
ИСО 14698-2:2003
IDT
Примечание - В настоящей таблице использовано следующее условное обозначение степени
соответствия стандарта:
-
IDТ - идентичные стандарты.
Библиография
Библиография
[1]
ISO 14644-1:1999
Cleanrooms and associated controlled environments - Part 1:
Classification of aircleanliness
[2]
ISO 14644-2:2000
Cleanrooms and associated controlled environments - Part 2:
Specifications for testing and monitoring to prove continued compliance
with ISO 14644-1
[3]
ISO 14644-3:2005
Cleanrooms and associated controlled environments - Part 3: Test
methods
[4]
ISO 14644-4:2001
Cleanrooms and associated controlled environments - Part 4: Design,
construction and start-up
[5]
ISO 14644-5:2004
Cleanrooms and associated controlled environments - Part 5:
Operations
